Langasite Bonding via High Temperature for Fabricating Sealed Microcavity of Pressure Sensors

We proposed a novel Langasite (LGS) bonding method only using high temperature to solve the manufacturing difficulty of the sealed microcavity of pressure sensors. The optimal bonding parameters by comparative experiments were defined as 1350 °C for 3 h. Due to simple experimental conditions, low ex...

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Detalles Bibliográficos
Autores principales: Zhang, Juan, Tan, Qiulin, Zhang, Lei, Zhao, Nan, Liang, Xiaorui
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8952366/
https://www.ncbi.nlm.nih.gov/pubmed/35334769
http://dx.doi.org/10.3390/mi13030479

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8952366/
https://www.ncbi.nlm.nih.gov/pubmed/35334769
http://dx.doi.org/10.3390/mi13030479

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