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Langasite Bonding via High Temperature for Fabricating Sealed Microcavity of Pressure Sensors
We proposed a novel Langasite (LGS) bonding method only using high temperature to solve the manufacturing difficulty of the sealed microcavity of pressure sensors. The optimal bonding parameters by comparative experiments were defined as 1350 °C for 3 h. Due to simple experimental conditions, low ex...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8952366/ https://www.ncbi.nlm.nih.gov/pubmed/35334769 http://dx.doi.org/10.3390/mi13030479 |