Chemical Vapour Deposition of Scandia-Stabilised Zirconia Layers on Tubular Substrates at Low Temperatures

The paper presents results of investigation on synthesis of non-porous ZrO(2)-Sc(2)O(2) layers on tubular substrates by MOCVD (metalorganic chemical vapor deposition) method using Sc(tmhd)(3) (Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)scandium(III), 99%) and Zr(tmhd)(4) (Tetrakis(2,2,6,6-tetrameth...

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Detalles Bibliográficos
Autor principal: Sawka, Agata
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8954047/
https://www.ncbi.nlm.nih.gov/pubmed/35329572
http://dx.doi.org/10.3390/ma15062120

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8954047/
https://www.ncbi.nlm.nih.gov/pubmed/35329572
http://dx.doi.org/10.3390/ma15062120

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