Dispersion Engineering of Silicon Nitride Microresonators via Reconstructable SU-8 Polymer Cladding

In this work, we propose a novel way to flexibly engineer the waveguide dispersion by patterning the cladding of waveguide microresonators. Experimentally, we demonstrate silicon nitride waveguides with air-, oxide-, and SU-8 polymer-cladding layers and compare the corresponding waveguide dispersion...

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Detalles Bibliográficos
Autores principales: Wang, Shang-Pu, Lee, Tien-Hsiang, Chen, You-Yuan, Wang, Pei-Hsun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8954077/
https://www.ncbi.nlm.nih.gov/pubmed/35334746
http://dx.doi.org/10.3390/mi13030454

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8954077/
https://www.ncbi.nlm.nih.gov/pubmed/35334746
http://dx.doi.org/10.3390/mi13030454

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