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Dispersion Engineering of Silicon Nitride Microresonators via Reconstructable SU-8 Polymer Cladding

In this work, we propose a novel way to flexibly engineer the waveguide dispersion by patterning the cladding of waveguide microresonators. Experimentally, we demonstrate silicon nitride waveguides with air-, oxide-, and SU-8 polymer-cladding layers and compare the corresponding waveguide dispersion...

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Detalles Bibliográficos
Autores principales: Wang, Shang-Pu, Lee, Tien-Hsiang, Chen, You-Yuan, Wang, Pei-Hsun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8954077/
https://www.ncbi.nlm.nih.gov/pubmed/35334746
http://dx.doi.org/10.3390/mi13030454
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author Wang, Shang-Pu
Lee, Tien-Hsiang
Chen, You-Yuan
Wang, Pei-Hsun
author_facet Wang, Shang-Pu
Lee, Tien-Hsiang
Chen, You-Yuan
Wang, Pei-Hsun
author_sort Wang, Shang-Pu
collection PubMed
description In this work, we propose a novel way to flexibly engineer the waveguide dispersion by patterning the cladding of waveguide microresonators. Experimentally, we demonstrate silicon nitride waveguides with air-, oxide-, and SU-8 polymer-cladding layers and compare the corresponding waveguide dispersion. By integrating SU-8 polymer as the outer cladding layer, the waveguide dispersion can be tuned from −143 to −257 ps/nm/km. Through the simple, conventional polymer stripping process, we reconstruct the waveguide dispersion back to that of the original air-cladded device without significantly impacting the quality factor of resonators. This work provides the potential to design the waveguide dispersion in normal and anomalous regimes within an integrated photonic circuit.
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spelling pubmed-89540772022-03-26 Dispersion Engineering of Silicon Nitride Microresonators via Reconstructable SU-8 Polymer Cladding Wang, Shang-Pu Lee, Tien-Hsiang Chen, You-Yuan Wang, Pei-Hsun Micromachines (Basel) Article In this work, we propose a novel way to flexibly engineer the waveguide dispersion by patterning the cladding of waveguide microresonators. Experimentally, we demonstrate silicon nitride waveguides with air-, oxide-, and SU-8 polymer-cladding layers and compare the corresponding waveguide dispersion. By integrating SU-8 polymer as the outer cladding layer, the waveguide dispersion can be tuned from −143 to −257 ps/nm/km. Through the simple, conventional polymer stripping process, we reconstruct the waveguide dispersion back to that of the original air-cladded device without significantly impacting the quality factor of resonators. This work provides the potential to design the waveguide dispersion in normal and anomalous regimes within an integrated photonic circuit. MDPI 2022-03-17 /pmc/articles/PMC8954077/ /pubmed/35334746 http://dx.doi.org/10.3390/mi13030454 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Wang, Shang-Pu
Lee, Tien-Hsiang
Chen, You-Yuan
Wang, Pei-Hsun
Dispersion Engineering of Silicon Nitride Microresonators via Reconstructable SU-8 Polymer Cladding
title Dispersion Engineering of Silicon Nitride Microresonators via Reconstructable SU-8 Polymer Cladding
title_full Dispersion Engineering of Silicon Nitride Microresonators via Reconstructable SU-8 Polymer Cladding
title_fullStr Dispersion Engineering of Silicon Nitride Microresonators via Reconstructable SU-8 Polymer Cladding
title_full_unstemmed Dispersion Engineering of Silicon Nitride Microresonators via Reconstructable SU-8 Polymer Cladding
title_short Dispersion Engineering of Silicon Nitride Microresonators via Reconstructable SU-8 Polymer Cladding
title_sort dispersion engineering of silicon nitride microresonators via reconstructable su-8 polymer cladding
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8954077/
https://www.ncbi.nlm.nih.gov/pubmed/35334746
http://dx.doi.org/10.3390/mi13030454
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