Cargando…
Dispersion Engineering of Silicon Nitride Microresonators via Reconstructable SU-8 Polymer Cladding
In this work, we propose a novel way to flexibly engineer the waveguide dispersion by patterning the cladding of waveguide microresonators. Experimentally, we demonstrate silicon nitride waveguides with air-, oxide-, and SU-8 polymer-cladding layers and compare the corresponding waveguide dispersion...
Autores principales: | , , , |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8954077/ https://www.ncbi.nlm.nih.gov/pubmed/35334746 http://dx.doi.org/10.3390/mi13030454 |
_version_ | 1784676004903518208 |
---|---|
author | Wang, Shang-Pu Lee, Tien-Hsiang Chen, You-Yuan Wang, Pei-Hsun |
author_facet | Wang, Shang-Pu Lee, Tien-Hsiang Chen, You-Yuan Wang, Pei-Hsun |
author_sort | Wang, Shang-Pu |
collection | PubMed |
description | In this work, we propose a novel way to flexibly engineer the waveguide dispersion by patterning the cladding of waveguide microresonators. Experimentally, we demonstrate silicon nitride waveguides with air-, oxide-, and SU-8 polymer-cladding layers and compare the corresponding waveguide dispersion. By integrating SU-8 polymer as the outer cladding layer, the waveguide dispersion can be tuned from −143 to −257 ps/nm/km. Through the simple, conventional polymer stripping process, we reconstruct the waveguide dispersion back to that of the original air-cladded device without significantly impacting the quality factor of resonators. This work provides the potential to design the waveguide dispersion in normal and anomalous regimes within an integrated photonic circuit. |
format | Online Article Text |
id | pubmed-8954077 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2022 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-89540772022-03-26 Dispersion Engineering of Silicon Nitride Microresonators via Reconstructable SU-8 Polymer Cladding Wang, Shang-Pu Lee, Tien-Hsiang Chen, You-Yuan Wang, Pei-Hsun Micromachines (Basel) Article In this work, we propose a novel way to flexibly engineer the waveguide dispersion by patterning the cladding of waveguide microresonators. Experimentally, we demonstrate silicon nitride waveguides with air-, oxide-, and SU-8 polymer-cladding layers and compare the corresponding waveguide dispersion. By integrating SU-8 polymer as the outer cladding layer, the waveguide dispersion can be tuned from −143 to −257 ps/nm/km. Through the simple, conventional polymer stripping process, we reconstruct the waveguide dispersion back to that of the original air-cladded device without significantly impacting the quality factor of resonators. This work provides the potential to design the waveguide dispersion in normal and anomalous regimes within an integrated photonic circuit. MDPI 2022-03-17 /pmc/articles/PMC8954077/ /pubmed/35334746 http://dx.doi.org/10.3390/mi13030454 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Wang, Shang-Pu Lee, Tien-Hsiang Chen, You-Yuan Wang, Pei-Hsun Dispersion Engineering of Silicon Nitride Microresonators via Reconstructable SU-8 Polymer Cladding |
title | Dispersion Engineering of Silicon Nitride Microresonators via Reconstructable SU-8 Polymer Cladding |
title_full | Dispersion Engineering of Silicon Nitride Microresonators via Reconstructable SU-8 Polymer Cladding |
title_fullStr | Dispersion Engineering of Silicon Nitride Microresonators via Reconstructable SU-8 Polymer Cladding |
title_full_unstemmed | Dispersion Engineering of Silicon Nitride Microresonators via Reconstructable SU-8 Polymer Cladding |
title_short | Dispersion Engineering of Silicon Nitride Microresonators via Reconstructable SU-8 Polymer Cladding |
title_sort | dispersion engineering of silicon nitride microresonators via reconstructable su-8 polymer cladding |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8954077/ https://www.ncbi.nlm.nih.gov/pubmed/35334746 http://dx.doi.org/10.3390/mi13030454 |
work_keys_str_mv | AT wangshangpu dispersionengineeringofsiliconnitridemicroresonatorsviareconstructablesu8polymercladding AT leetienhsiang dispersionengineeringofsiliconnitridemicroresonatorsviareconstructablesu8polymercladding AT chenyouyuan dispersionengineeringofsiliconnitridemicroresonatorsviareconstructablesu8polymercladding AT wangpeihsun dispersionengineeringofsiliconnitridemicroresonatorsviareconstructablesu8polymercladding |