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Dispersion Engineering of Silicon Nitride Microresonators via Reconstructable SU-8 Polymer Cladding
In this work, we propose a novel way to flexibly engineer the waveguide dispersion by patterning the cladding of waveguide microresonators. Experimentally, we demonstrate silicon nitride waveguides with air-, oxide-, and SU-8 polymer-cladding layers and compare the corresponding waveguide dispersion...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8954077/ https://www.ncbi.nlm.nih.gov/pubmed/35334746 http://dx.doi.org/10.3390/mi13030454 |