Design of a Capacitive MEMS Accelerometer with Softened Beams

Lower stiffness can improve the performance of capacitive-based microelectromechanical systems sensors. In this paper, softened beams, achieved by the electrostatic assembly approach, are proposed to lower the stiffness of a capacitive MEMS accelerometer. The experiments show that the stiffness of t...

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Detalles Bibliográficos
Autores principales: Wang, Chenggang, Hao, Yongcun, Sun, Zheng, Zu, Luhan, Yuan, Weizheng, Chang, Honglong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8954210/
https://www.ncbi.nlm.nih.gov/pubmed/35334750
http://dx.doi.org/10.3390/mi13030459

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8954210/
https://www.ncbi.nlm.nih.gov/pubmed/35334750
http://dx.doi.org/10.3390/mi13030459

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