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Design of a Capacitive MEMS Accelerometer with Softened Beams
Lower stiffness can improve the performance of capacitive-based microelectromechanical systems sensors. In this paper, softened beams, achieved by the electrostatic assembly approach, are proposed to lower the stiffness of a capacitive MEMS accelerometer. The experiments show that the stiffness of t...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8954210/ https://www.ncbi.nlm.nih.gov/pubmed/35334750 http://dx.doi.org/10.3390/mi13030459 |