Long Stroke Design of Piezoelectric Walking Actuator for Wafer Probe Station

In order to develop a high-resolution piezoelectric walking actuator with a long stroke for the wafer probe station, this work presents a design of a piezoelectric walking actuator with two auxiliary clamping feet elastically attached to major clamping feet. Its construction was introduced and its o...

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Detalles Bibliográficos
Autores principales: Yang, Cheng, Wang, Yin, Fan, Wei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8954415/
https://www.ncbi.nlm.nih.gov/pubmed/35334704
http://dx.doi.org/10.3390/mi13030412

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8954415/
https://www.ncbi.nlm.nih.gov/pubmed/35334704
http://dx.doi.org/10.3390/mi13030412

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