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Long Stroke Design of Piezoelectric Walking Actuator for Wafer Probe Station

In order to develop a high-resolution piezoelectric walking actuator with a long stroke for the wafer probe station, this work presents a design of a piezoelectric walking actuator with two auxiliary clamping feet elastically attached to major clamping feet. Its construction was introduced and its o...

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Detalles Bibliográficos
Autores principales: Yang, Cheng, Wang, Yin, Fan, Wei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8954415/
https://www.ncbi.nlm.nih.gov/pubmed/35334704
http://dx.doi.org/10.3390/mi13030412
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author Yang, Cheng
Wang, Yin
Fan, Wei
author_facet Yang, Cheng
Wang, Yin
Fan, Wei
author_sort Yang, Cheng
collection PubMed
description In order to develop a high-resolution piezoelectric walking actuator with a long stroke for the wafer probe station, this work presents a design of a piezoelectric walking actuator with two auxiliary clamping feet elastically attached to major clamping feet. Its construction was introduced and its operating principle was analyzed. Structure design details were discussed and a prototype was proposed. The prototype was fabricated and tested. The experimental results show that the proposed actuator can operate stably along a 20 mm guider. The proposed design is suitable for precision motion control applications.
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spelling pubmed-89544152022-03-26 Long Stroke Design of Piezoelectric Walking Actuator for Wafer Probe Station Yang, Cheng Wang, Yin Fan, Wei Micromachines (Basel) Article In order to develop a high-resolution piezoelectric walking actuator with a long stroke for the wafer probe station, this work presents a design of a piezoelectric walking actuator with two auxiliary clamping feet elastically attached to major clamping feet. Its construction was introduced and its operating principle was analyzed. Structure design details were discussed and a prototype was proposed. The prototype was fabricated and tested. The experimental results show that the proposed actuator can operate stably along a 20 mm guider. The proposed design is suitable for precision motion control applications. MDPI 2022-03-05 /pmc/articles/PMC8954415/ /pubmed/35334704 http://dx.doi.org/10.3390/mi13030412 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Yang, Cheng
Wang, Yin
Fan, Wei
Long Stroke Design of Piezoelectric Walking Actuator for Wafer Probe Station
title Long Stroke Design of Piezoelectric Walking Actuator for Wafer Probe Station
title_full Long Stroke Design of Piezoelectric Walking Actuator for Wafer Probe Station
title_fullStr Long Stroke Design of Piezoelectric Walking Actuator for Wafer Probe Station
title_full_unstemmed Long Stroke Design of Piezoelectric Walking Actuator for Wafer Probe Station
title_short Long Stroke Design of Piezoelectric Walking Actuator for Wafer Probe Station
title_sort long stroke design of piezoelectric walking actuator for wafer probe station
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8954415/
https://www.ncbi.nlm.nih.gov/pubmed/35334704
http://dx.doi.org/10.3390/mi13030412
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