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Long Stroke Design of Piezoelectric Walking Actuator for Wafer Probe Station
In order to develop a high-resolution piezoelectric walking actuator with a long stroke for the wafer probe station, this work presents a design of a piezoelectric walking actuator with two auxiliary clamping feet elastically attached to major clamping feet. Its construction was introduced and its o...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8954415/ https://www.ncbi.nlm.nih.gov/pubmed/35334704 http://dx.doi.org/10.3390/mi13030412 |