A MEMS Electrochemical Seismometer Based on the Integrated Structure of Centrosymmetric Four Electrodes

This paper presented an electrochemical seismic micro sensor based on an integrated structure of four centrosymmetric electrodes. In this integrative structure, cathodes were not only distributed on wafer surfaces but also on the inner walls of the flow holes of the wafer, which increased the effect...

Descripción completa

Detalles Bibliográficos
Autores principales: Duan, Yumo, Zhong, Anxiang, Lu, Yulan, Chen, Jian, Chen, Deyong, Wang, Junbo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8954670/
https://www.ncbi.nlm.nih.gov/pubmed/35334646
http://dx.doi.org/10.3390/mi13030354

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8954670/
https://www.ncbi.nlm.nih.gov/pubmed/35334646
http://dx.doi.org/10.3390/mi13030354

Ejemplares similares