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A MEMS Electrochemical Seismometer Based on the Integrated Structure of Centrosymmetric Four Electrodes
This paper presented an electrochemical seismic micro sensor based on an integrated structure of four centrosymmetric electrodes. In this integrative structure, cathodes were not only distributed on wafer surfaces but also on the inner walls of the flow holes of the wafer, which increased the effect...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8954670/ https://www.ncbi.nlm.nih.gov/pubmed/35334646 http://dx.doi.org/10.3390/mi13030354 |