Influence of Thin Film Deposition on AFM Cantilever Tips in Adhesion and Young’s Modulus of MEMS Surfaces

Adhesion is a critical factor in microelectromechanical systems (MEMSs) and is influenced by many parameters. In important fields, such as microassembly, an improved understanding of adhesion can result in higher precision. This study examines the influence of deposition of gold and titanium onto th...

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Detalles Bibliográficos
Autores principales: Heidari, Pedram, Salehi, Majid, Ruhani, Behrooz, Purcar, Violeta, Căprărescu, Simona
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8955253/
https://www.ncbi.nlm.nih.gov/pubmed/35329554
http://dx.doi.org/10.3390/ma15062102

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8955253/
https://www.ncbi.nlm.nih.gov/pubmed/35329554
http://dx.doi.org/10.3390/ma15062102

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