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Influence of Thin Film Deposition on AFM Cantilever Tips in Adhesion and Young’s Modulus of MEMS Surfaces
Adhesion is a critical factor in microelectromechanical systems (MEMSs) and is influenced by many parameters. In important fields, such as microassembly, an improved understanding of adhesion can result in higher precision. This study examines the influence of deposition of gold and titanium onto th...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8955253/ https://www.ncbi.nlm.nih.gov/pubmed/35329554 http://dx.doi.org/10.3390/ma15062102 |