Investigation of the Shadow Effect in Focused Ion Beam Induced Deposition

Due to the precursor gas flow in the focused ion beam induced deposition process, a shadow effect appears behind the shading structures. This article carries out experiments with phenanthrene as the precursor gas and establishes a numerical model to define the shadow area and estimate the intensity...

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Detalles Bibliográficos
Autores principales: Fang, Chen, Xing, Yan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8955986/
https://www.ncbi.nlm.nih.gov/pubmed/35335717
http://dx.doi.org/10.3390/nano12060905

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8955986/
https://www.ncbi.nlm.nih.gov/pubmed/35335717
http://dx.doi.org/10.3390/nano12060905

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