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Investigation of the Shadow Effect in Focused Ion Beam Induced Deposition
Due to the precursor gas flow in the focused ion beam induced deposition process, a shadow effect appears behind the shading structures. This article carries out experiments with phenanthrene as the precursor gas and establishes a numerical model to define the shadow area and estimate the intensity...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8955986/ https://www.ncbi.nlm.nih.gov/pubmed/35335717 http://dx.doi.org/10.3390/nano12060905 |