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MEMS Underwater Directional Acoustic Sensor in Near Neutral Buoyancy Configuration

A MEMS directional acoustic sensor housed in an air cavity and operated underwater in a near-neutral buoyancy configuration is demonstrated. The sensor consists of two wings connected by a bridge and attached to a substrate by two centrally mounted torsional legs. The frequency response showed two r...

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Detalles Bibliográficos
Autores principales: Alves, Fabio, Park, Jaehyun, McCarty, Leland, Rabelo, Renato, Karunasiri, Gamani
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8962973/
https://www.ncbi.nlm.nih.gov/pubmed/35214239
http://dx.doi.org/10.3390/s22041337