Toward Single-Atomic-Layer Lithography on Highly Oriented Pyrolytic Graphite Surfaces Using AFM-Based Electrochemical Etching

Atomic force microscopy (AFM)-based electrochemical etching of a highly oriented pyrolytic graphite (HOPG) surface is studied toward the single-atomic-layer lithography of intricate patterns. Electrochemical etching is performed in the water meniscus formed between the AFM tip apex and HOPG surface...

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Detalles Bibliográficos
Autores principales: Han, Wei, Mathew, Paven Thomas, Kolagatla, Srikanth, Rodriguez, Brian J., Fang, Fengzhou
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer Singapore 2022
Materias:
Original Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8964569/
https://www.ncbi.nlm.nih.gov/pubmed/35402782
http://dx.doi.org/10.1007/s41871-022-00127-9

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8964569/
https://www.ncbi.nlm.nih.gov/pubmed/35402782
http://dx.doi.org/10.1007/s41871-022-00127-9

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