Millimeter-scale focal length tuning with MEMS-integrated meta-optics employing high-throughput fabrication

Miniature varifocal lenses are crucial for many applications requiring compact optical systems. Here, utilizing electro-mechanically actuated 0.5-mm aperture infrared Alvarez meta-optics, we demonstrate 3.1 mm (200 diopters) focal length tuning with an actuation voltage below 40 V. This constitutes...

Descripción completa

Detalles Bibliográficos
Autores principales: Han, Zheyi, Colburn, Shane, Majumdar, Arka, Böhringer, Karl F.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8967899/
https://www.ncbi.nlm.nih.gov/pubmed/35354839
http://dx.doi.org/10.1038/s41598-022-09277-8

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8967899/
https://www.ncbi.nlm.nih.gov/pubmed/35354839
http://dx.doi.org/10.1038/s41598-022-09277-8

Ejemplares similares