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Millimeter-scale focal length tuning with MEMS-integrated meta-optics employing high-throughput fabrication
Miniature varifocal lenses are crucial for many applications requiring compact optical systems. Here, utilizing electro-mechanically actuated 0.5-mm aperture infrared Alvarez meta-optics, we demonstrate 3.1 mm (200 diopters) focal length tuning with an actuation voltage below 40 V. This constitutes...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8967899/ https://www.ncbi.nlm.nih.gov/pubmed/35354839 http://dx.doi.org/10.1038/s41598-022-09277-8 |