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Study of high–low KPFM on a pn-patterned Si surface
Comparative measurements between frequency modulation Kelvin probe force microscopy (FM-KPFM) using low frequency bias voltage and heterodyne FM-KPFM using high frequency bias voltage were performed on the surface potential measurement. A silicon substrate patterned with p- and n-type impurities was...
Autores principales: | Izumi, Ryo, Li, Yan Jun, Naitoh, Yoshitaka, Sugawara, Yasuhiro |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Oxford University Press
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8973402/ https://www.ncbi.nlm.nih.gov/pubmed/35018450 http://dx.doi.org/10.1093/jmicro/dfab055 |
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