Detection of volatile organic compounds using mid-infrared silicon nitride waveguide sensors

Mid-infrared (mid-IR) sensors consisting of silicon nitride (SiN) waveguides were designed and tested to detect volatile organic compounds (VOCs). SiN thin films, prepared by low-pressure chemical vapor deposition (LPCVD), have a broad mid-IR transparent region and a lower refractive index (n(SiN) =...

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Detalles Bibliográficos
Autores principales: Zhou, Junchao, Al Husseini, Diana, Li, Junyan, Lin, Zhihai, Sukhishvili, Svetlana, Coté, Gerard L., Gutierrez-Osuna, Ricardo, Lin, Pao Tai
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8976853/
https://www.ncbi.nlm.nih.gov/pubmed/35368033
http://dx.doi.org/10.1038/s41598-022-09597-9

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8976853/
https://www.ncbi.nlm.nih.gov/pubmed/35368033
http://dx.doi.org/10.1038/s41598-022-09597-9

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