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Detection of volatile organic compounds using mid-infrared silicon nitride waveguide sensors
Mid-infrared (mid-IR) sensors consisting of silicon nitride (SiN) waveguides were designed and tested to detect volatile organic compounds (VOCs). SiN thin films, prepared by low-pressure chemical vapor deposition (LPCVD), have a broad mid-IR transparent region and a lower refractive index (n(SiN) =...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8976853/ https://www.ncbi.nlm.nih.gov/pubmed/35368033 http://dx.doi.org/10.1038/s41598-022-09597-9 |