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Analysis of the n-GaN electrochemical etching process and its mechanism in oxalic acid

We studied the wet electrochemical etching of n-GaN films in oxalic acid. The electrooxidation processes occur in a potentiostatic mode in the voltage range of 5 to 20 V. We described the formation of the porous n-GaN layer structures in several ways. Firstly, we observed the microphotographs of the...

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Detalles Bibliográficos
Autores principales: Shushanian, Artem, Iida, Daisuke, Zhuang, Zhe, Han, Yu, Ohkawa, Kazuhiro
Formato: Online Artículo Texto
Lenguaje:English
Publicado: The Royal Society of Chemistry 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8981382/
https://www.ncbi.nlm.nih.gov/pubmed/35425502
http://dx.doi.org/10.1039/d1ra07992a