Spatial modulation of nanopattern dimensions by combining interference lithography and grayscale-patterned secondary exposure

Functional nanostructures are exploited for a variety of cutting-edge fields including plasmonics, metasurfaces, and biosensors, just to name a few. Some applications require nanostructures with uniform feature sizes while others rely on spatially varying morphologies. However, fine manipulation of...

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Detalles Bibliográficos
Autores principales: Gan, Zhuofei, Feng, Hongtao, Chen, Liyang, Min, Siyi, Liang, Chuwei, Xu, Menghong, Jiang, Zijie, Sun, Zhao, Sun, Chuying, Cui, Dehu, Li, Wen-Di
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8993805/
https://www.ncbi.nlm.nih.gov/pubmed/35396549
http://dx.doi.org/10.1038/s41377-022-00774-z

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8993805/
https://www.ncbi.nlm.nih.gov/pubmed/35396549
http://dx.doi.org/10.1038/s41377-022-00774-z

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