A ReaxFF Molecular Dynamics Study of Hydrogen Diffusion in Ruthenium–The Role of Grain Boundaries

[Image: see text] Ruthenium (Ru) thin films are used as protective caps for the multilayer mirrors in extreme ultraviolet lithography machines. When these mirrors are exposed to atomic hydrogen (H), it can permeate through Ru, leading to the formation of hydrogen-filled blisters on the mirrors. H ha...

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Detalles Bibliográficos
Autores principales: Onwudinanti, Chidozie, Pols, Mike, Brocks, Geert, Koelman, Vianney, van Duin, Adri C. T., Morgan, Thomas, Tao, Shuxia
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2022
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8996245/
https://www.ncbi.nlm.nih.gov/pubmed/35422891
http://dx.doi.org/10.1021/acs.jpcc.1c08776

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8996245/
https://www.ncbi.nlm.nih.gov/pubmed/35422891
http://dx.doi.org/10.1021/acs.jpcc.1c08776

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