Optimized ICPCVD-Based TiO(2) for Photonics

We propose obtaining TiO(2) films by ICPCVD for the fabrication of low-loss waveguides. The challenge is to produce a dense and homogeneous layer with a high refractive index and low absorption in the visible range. Crystallized layers with features such as grains and amorphous layers have a rather...

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Detalles Bibliográficos
Autores principales: Andrieux, Aurore, Mennemanteuil, Marie-Maxime, Geoffroy, Nicolas, Emo, Mélanie, Markey, Laurent, Hammani, Kamal
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8999815/
https://www.ncbi.nlm.nih.gov/pubmed/35407910
http://dx.doi.org/10.3390/ma15072578

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8999815/
https://www.ncbi.nlm.nih.gov/pubmed/35407910
http://dx.doi.org/10.3390/ma15072578

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