Cargando…
Optimized ICPCVD-Based TiO(2) for Photonics
We propose obtaining TiO(2) films by ICPCVD for the fabrication of low-loss waveguides. The challenge is to produce a dense and homogeneous layer with a high refractive index and low absorption in the visible range. Crystallized layers with features such as grains and amorphous layers have a rather...
| Autores principales: | , , , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8999815/ https://www.ncbi.nlm.nih.gov/pubmed/35407910 http://dx.doi.org/10.3390/ma15072578 |