Wafer-Scale Fabrication and Transfer of Porous Silicon Films as Flexible Nanomaterials for Sensing Application

Flexible sensors are highly advantageous for integration in portable and wearable devices. In this work, we propose and validate a simple strategy to achieve whole wafer-size flexible SERS substrate via a one-step metal-assisted chemical etching (MACE). A pre-patterning Si wafer allows for PSi struc...

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Detalles Bibliográficos
Autores principales: Lu, Han, Jin, Mingliang, Zhang, Zongbao, Wu, Sujuan, Shui, Lingling
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9000722/
https://www.ncbi.nlm.nih.gov/pubmed/35407309
http://dx.doi.org/10.3390/nano12071191

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9000722/
https://www.ncbi.nlm.nih.gov/pubmed/35407309
http://dx.doi.org/10.3390/nano12071191

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