Cargando…

Wafer-Scale Fabrication and Transfer of Porous Silicon Films as Flexible Nanomaterials for Sensing Application

Flexible sensors are highly advantageous for integration in portable and wearable devices. In this work, we propose and validate a simple strategy to achieve whole wafer-size flexible SERS substrate via a one-step metal-assisted chemical etching (MACE). A pre-patterning Si wafer allows for PSi struc...

Descripción completa

Detalles Bibliográficos
Autores principales:	Lu, Han, Jin, Mingliang, Zhang, Zongbao, Wu, Sujuan, Shui, Lingling
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9000722/ https://www.ncbi.nlm.nih.gov/pubmed/35407309 http://dx.doi.org/10.3390/nano12071191

Ejemplares similares

Fabrication of PIN diode detectors on thinned silicon wafers
por: Ronchin, Sabina, et al.
Publicado: (2004)

Fabrication of WS(2)/GaN p-n Junction by Wafer-Scale WS(2) Thin Film Transfer
por: Yu, Yang, et al.
Publicado: (2016)

Silicon Wafer Fabrication and Microchannel for Cooling System in ALICE ITS
por: Pasuwan, Patrawan
Publicado: (2013)

Thermal Properties of Porous Silicon Nanomaterials
por: Fedorov, Aleksandr S., et al.
Publicado: (2022)

Gated Silicon Drift Detector Fabricated from a Low-Cost Silicon Wafer
por: Matsuura, Hideharu, et al.
Publicado: (2015)

High-yield, wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic circuits
por: Liu, Junqiu, et al.
Publicado: (2021)

Wafer-scale freestanding vanadium dioxide film
por: Ma, He, et al.
Publicado: (2021)

Flexible solar cells based on foldable silicon wafers with blunted edges
por: Liu, Wenzhu, et al.
Publicado: (2023)

Wafer-scale synthesis of a morphologically controllable silicon ordered array as a platform and its SERS performance
por: Song, Jizhe, et al.
Publicado: (2023)

Wafer-Scale Patterning of Protein Templates for Hydrogel Fabrication
por: Kim, Anna A., et al.
Publicado: (2021)

Highly organised and dense vertical silicon nanowire arrays grown in porous alumina template on <100> silicon wafers
por: Gorisse, Therese, et al.
Publicado: (2013)

Wafer-scale nanofabrication of telecom single-photon emitters in silicon
por: Hollenbach, Michael, et al.
Publicado: (2022)

Wafer-Scale Fabrication of Silicon Nanocones via Controlling Catalyst Evolution in All-Wet Metal-Assisted Chemical Etching
por: Bian, Chenyu, et al.
Publicado: (2022)

Sensitive Transfer-Free Wafer-Scale Graphene Microphones
por: Pezone, Roberto, et al.
Publicado: (2022)

Highly flexible method for the fabrication of photonic crystal slabs based on the selective formation of porous silicon
por: Recio-Sánchez, Gonzalo, et al.
Publicado: (2012)

Wafer-Scale Integration of Inverted Nanopyramid Arrays for Advanced Light Trapping in Crystalline Silicon Thin Film Solar Cells
por: Zhou, Suqiong, et al.
Publicado: (2016)

High thermal conductivity in wafer-scale cubic silicon carbide crystals
por: Cheng, Zhe, et al.
Publicado: (2022)

Wafer-scale fabrication and growth dynamics of suspended graphene nanoribbon arrays
por: Suzuki, Hiroo, et al.
Publicado: (2016)

Carbon-Based Nanomaterials Thin Film Deposited on a Flexible Substrate for Strain Sensing Application
por: Her, Shiuh-Chuan, et al.
Publicado: (2022)

Handbook of silicon wafer cleaning technology
por: Reinhardt, Karen, et al.
Publicado: (2018)

Facile and stable fabrication of wafer-scale, ultra-black c-silicon with 3D nano/micro hybrid structures for solar cells
por: Zhang, Xiaomeng, et al.
Publicado: (2022)

Wafer-Scale Fabrication of Ultra-High Aspect Ratio, Microscale Silicon Structures with Smooth Sidewalls Using Metal Assisted Chemical Etching
por: Zhang, Xiaomeng, et al.
Publicado: (2023)

A wafer-scale fabrication method for three-dimensional plasmonic hollow nanopillars
por: Jonker, D., et al.
Publicado: (2021)

Epitaxial Growth of Silicon on Silicon Wafers by Direct Laser Melting
por: Le Dantec, Marie, et al.
Publicado: (2020)

A Novel Fabrication Method for a Capacitive MEMS Accelerometer Based on Glass–Silicon Composite Wafers
por: He, Yurong, et al.
Publicado: (2021)

Fabrication of 2-D Capacitive Micromachined Ultrasonic Transducer (CMUT) Array through Silicon Wafer Bonding
por: Wang, Ziyuan, et al.
Publicado: (2022)

Fabrication and Cytocompatibility of In Situ Crosslinked Carbon Nanomaterial Films
por: Patel, Sunny C., et al.
Publicado: (2015)

Micro-spectroscopy on silicon wafers and solar cells
por: Gundel, Paul, et al.
Publicado: (2011)

A Mechanochemical Approach to Porous Silicon Nanoparticles Fabrication
por: Russo, Luigi, et al.
Publicado: (2011)

Direct Wafer-Scale CVD Graphene Growth under Platinum Thin-Films
por: Hagendoorn, Yelena, et al.
Publicado: (2022)

Monolithic Wafer Scale Integration of Silicon Nanoribbon Sensors with CMOS for Lab-on-Chip Application
por: Jayakumar, Ganesh, et al.
Publicado: (2018)

Co-Design Method and Wafer-Level Packaging Technique of Thin-Film Flexible Antenna and Silicon CMOS Rectifier Chips for Wireless-Powered Neural Interface Systems
por: Okabe, Kenji, et al.
Publicado: (2015)

Route to Cost-Effective Fabrication of Wafer-Scale Nanostructure through Self-Priming Nanoimprint
por: Su, Yue, et al.
Publicado: (2021)

Dielectrophoresis-Based Positioning of Carbon Nanotubes for Wafer-Scale Fabrication of Carbon Nanotube Devices
por: Kimbrough, Joevonte, et al.
Publicado: (2020)

Fabrication and near-field visualization of a wafer-scale dense plasmonic nanostructured array
por: Yun, Jungheum, et al.
Publicado: (2018)

Self-Healing Flexible Conductive Film by Repairing Defects via Flowable Liquid Metal Droplets
por: Niu, Ruiwen, et al.
Publicado: (2019)

Electrodeposition of Bi-Te Thin Films on Silicon Wafer and Micro-Column Arrays on Microporous Glass Template
por: Su, Ning, et al.
Publicado: (2020)

Light-harvesting bio-nanomaterial using porous silicon and photosynthetic reaction center
por: Hajdu, Kata, et al.
Publicado: (2012)

Stacking transfer of wafer-scale graphene-based van der Waals superlattices
por: Yuan, Guowen, et al.
Publicado: (2023)

Wafer-scale growth of VO(2) thin films using a combinatorial approach
por: Zhang, Hai-Tian, et al.
Publicado: (2015)

Cannot write session to /tmp/vufind_sessions/sess_4fampnlmu3eg62411ni8d0hl8u