Two High-Precision Proximity Capacitance CMOS Image Sensors with Large Format and High Resolution †

This paper presents newly developed two high-precision CMOS proximity capacitance image sensors: Chip A with 12 μm pitch pixels with a large detection area of 1.68 cm(2); Chip B with 2.8 μm pitch 1.8 M pixels for a higher resolution. Both fabricated chips achieved a capacitance detection precision o...

Descripción completa

Detalles Bibliográficos
Autores principales: Sugama, Yuki, Watanabe, Yoshiaki, Kuroda, Rihito, Yamamoto, Masahiro, Goto, Tetsuya, Yasuda, Toshiro, Hamori, Hiroshi, Kuriyama, Naoya, Sugawa, Shigetoshi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9002872/
https://www.ncbi.nlm.nih.gov/pubmed/35408384
http://dx.doi.org/10.3390/s22072770

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9002872/
https://www.ncbi.nlm.nih.gov/pubmed/35408384
http://dx.doi.org/10.3390/s22072770

Ejemplares similares