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Improved resistive switching characteristics of a multi-stacked HfO(2)/Al(2)O(3)/HfO(2) RRAM structure for neuromorphic and synaptic applications: experimental and computational study
Atomic Layer Deposition (ALD) was used for a tri-layer structure (HfO(2)/Al(2)O(3)/HfO(2)) at low temperature over an Indium Tin Oxide (ITO) transparent electrode. First, the microstructure of the fabricated TaN/HfO(2)/Al(2)O(3)/HfO(2)/ITO RRAM device was examined by the cross-sectional High-Resolut...
Autores principales: | , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
The Royal Society of Chemistry
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9008441/ https://www.ncbi.nlm.nih.gov/pubmed/35432948 http://dx.doi.org/10.1039/d1ra08103a |