So, You Want to Have a Nanofab? Shared-Use Nanofabrication and Characterization Facilities: Cost-of-Ownership, Toolset, Utilization, and Lessons Learned

Nanofabrication/characterization facilities enable research and development activities across a host of science and engineering disciplines. The collection of tools and supporting infrastructure necessary to construct, image, and measure micro- and nanoscale materials, devices, and systems is comple...

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Detalles Bibliográficos
Autores principales: Liddle, J. Alexander, Bowser, Jerry, Ilic, B. Robert, Luciani, Vincent
Formato: Online Artículo Texto
Lenguaje:English
Publicado: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9017145/
https://www.ncbi.nlm.nih.gov/pubmed/35465394
http://dx.doi.org/10.6028/jres.125.009

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9017145/
https://www.ncbi.nlm.nih.gov/pubmed/35465394
http://dx.doi.org/10.6028/jres.125.009

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