A New Optical Configuration for the Surface Encoder with an Expanded Z-Directional Measuring Range

This paper proposes a new optical configuration for a two-axis surface encoder that can measure the in-plane (X-axis) and out-of-plane (Z-axis) displacements of a positioning stage. The two-axis surface encoder is composed of a scale grating and a sensor head. A transparent grating is employed in th...

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Detalles Bibliográficos
Autores principales: Hong, Yifan, Sato, Ryo, Shimizu, Yuki, Matsukuma, Hiraku, Gao, Wei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9025088/
https://www.ncbi.nlm.nih.gov/pubmed/35459003
http://dx.doi.org/10.3390/s22083010

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9025088/
https://www.ncbi.nlm.nih.gov/pubmed/35459003
http://dx.doi.org/10.3390/s22083010

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