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A New Optical Configuration for the Surface Encoder with an Expanded Z-Directional Measuring Range
This paper proposes a new optical configuration for a two-axis surface encoder that can measure the in-plane (X-axis) and out-of-plane (Z-axis) displacements of a positioning stage. The two-axis surface encoder is composed of a scale grating and a sensor head. A transparent grating is employed in th...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9025088/ https://www.ncbi.nlm.nih.gov/pubmed/35459003 http://dx.doi.org/10.3390/s22083010 |