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A Study of Ta(2)O(5) Nanopillars with Ni Tips Prepared by Porous Anodic Alumina Through-Mask Anodization
The paper discusses the formation of Ta(2)O(5) pillars with Ni tips during thin porous anodic alumina through-mask anodization on Si/SiO(2) substrates. The tantalum nanopillars were formed through porous masks in electrolytes of phosphoric and oxalic acid. The Ni tips on the Ta(2)O(5) pillars were f...
Autores principales: | , , , , , , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9025906/ https://www.ncbi.nlm.nih.gov/pubmed/35458052 http://dx.doi.org/10.3390/nano12081344 |