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A Study of Ta(2)O(5) Nanopillars with Ni Tips Prepared by Porous Anodic Alumina Through-Mask Anodization

The paper discusses the formation of Ta(2)O(5) pillars with Ni tips during thin porous anodic alumina through-mask anodization on Si/SiO(2) substrates. The tantalum nanopillars were formed through porous masks in electrolytes of phosphoric and oxalic acid. The Ni tips on the Ta(2)O(5) pillars were f...

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Detalles Bibliográficos
Autores principales: Vorobjova, Alla I., Tishkevich, Daria I., Outkina, Elena A., Shimanovich, Dmitry L., Razanau, Ihar U., Zubar, Tatiana I., Bondaruk, Anastasia A., Zheleznova, Ekaterina K., Dong, Mengge, Aloraini, Dalal A., Sayyed, M. I., Almuqrin, Aljawhara H., Silibin, Maxim V., Trukhanov, Sergey V., Trukhanov, Alex V.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9025906/
https://www.ncbi.nlm.nih.gov/pubmed/35458052
http://dx.doi.org/10.3390/nano12081344