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A Study of Ta(2)O(5) Nanopillars with Ni Tips Prepared by Porous Anodic Alumina Through-Mask Anodization
The paper discusses the formation of Ta(2)O(5) pillars with Ni tips during thin porous anodic alumina through-mask anodization on Si/SiO(2) substrates. The tantalum nanopillars were formed through porous masks in electrolytes of phosphoric and oxalic acid. The Ni tips on the Ta(2)O(5) pillars were f...
Autores principales: | Vorobjova, Alla I., Tishkevich, Daria I., Outkina, Elena A., Shimanovich, Dmitry L., Razanau, Ihar U., Zubar, Tatiana I., Bondaruk, Anastasia A., Zheleznova, Ekaterina K., Dong, Mengge, Aloraini, Dalal A., Sayyed, M. I., Almuqrin, Aljawhara H., Silibin, Maxim V., Trukhanov, Sergey V., Trukhanov, Alex V. |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9025906/ https://www.ncbi.nlm.nih.gov/pubmed/35458052 http://dx.doi.org/10.3390/nano12081344 |
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