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Self-Calibration Technique with Lightweight Algorithm for Thermal Drift Compensation in MEMS Accelerometers

Capacitive MEMS accelerometers have a high thermal sensitivity that drifts the output when subjected to changes in temperature. To improve their performance in applications with thermal variations, it is necessary to compensate for these effects. These drifts can be compensated using a lightweight a...

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Detalles Bibliográficos
Autores principales: Martínez, Javier, Asiain, David, Beltrán, José Ramón
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9026479/
https://www.ncbi.nlm.nih.gov/pubmed/35457889
http://dx.doi.org/10.3390/mi13040584