Simple and Robust Microfabrication of Polymeric Piezoelectric Resonating MEMS Mass Sensors

Resonating MEMS mass sensors are microdevices with broad applications in fields such as bioscience and biochemistry. Their advantageous surface-to-volume ratio makes their resonant frequency highly sensitive to variations in their mass induced by surface depositions. Recent global challenges, such a...

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Detalles Bibliográficos
Autores principales: Ge, Chang, Cretu, Edmond
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9029203/
https://www.ncbi.nlm.nih.gov/pubmed/35458979
http://dx.doi.org/10.3390/s22082994

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9029203/
https://www.ncbi.nlm.nih.gov/pubmed/35458979
http://dx.doi.org/10.3390/s22082994

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