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Simple and Robust Microfabrication of Polymeric Piezoelectric Resonating MEMS Mass Sensors
Resonating MEMS mass sensors are microdevices with broad applications in fields such as bioscience and biochemistry. Their advantageous surface-to-volume ratio makes their resonant frequency highly sensitive to variations in their mass induced by surface depositions. Recent global challenges, such a...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2022
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9029203/ https://www.ncbi.nlm.nih.gov/pubmed/35458979 http://dx.doi.org/10.3390/s22082994 |