Comparison of Vibration-Assisted Scratch Characteristics of SiC Polytypes (3C-, 4H- and 6H-SiC)

Single-crystal silicon carbide (SiC) is widely used because of its excellent properties. However, SiC is a typical hard and brittle material, and there are many challenges in realizing its high efficiency and high-precision machining. Grinding is the main method used to achieve the high-efficiency p...

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Detalles Bibliográficos
Autores principales: Lin, Wuqing, Hu, Zhongwei, Chen, Yue, Zhang, Yuqiang, Yu, Yiqing, Xu, Xipeng, Zhang, Jie
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9030126/
https://www.ncbi.nlm.nih.gov/pubmed/35457944
http://dx.doi.org/10.3390/mi13040640

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9030126/
https://www.ncbi.nlm.nih.gov/pubmed/35457944
http://dx.doi.org/10.3390/mi13040640

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