Structure Fabrication on Silicon at Atomic and Close-To-Atomic Scale Using Atomic Force Microscopy: Implications for Nanopatterning and Nanodevice Fabrication

In this paper, the atomic-scale structure fabrication on Si (100) substrate using atomic force microscopy (AFM) with the aid of electrochemical and mechanical processes in a humid environment and under ambient conditions is studied. The local oxidation patterns are formed using platinum-coated tips...

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Detalles Bibliográficos
Autores principales: Mathew, Paven Thomas, Han, Wei, Rodriguez, Brian J., Fang, Fengzhou
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9030699/
https://www.ncbi.nlm.nih.gov/pubmed/35457829
http://dx.doi.org/10.3390/mi13040524

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9030699/
https://www.ncbi.nlm.nih.gov/pubmed/35457829
http://dx.doi.org/10.3390/mi13040524

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