Influence of ZnO Film Deposition Parameters on Piezoelectric Properties and Film-to-Substrate Adhesion on a GH4169 Superalloy Steel Substrate

ZnO film is widely used in the field of health monitoring sensors, which has high requirements for the piezoelectric coefficient and film-to-substrate adhesion of the ZnO film. In this study, ZnO thin films were grown on a GH4169 superalloy steel (GSS) substrate using magnetron sputtering, and the e...

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Detalles Bibliográficos
Autores principales: Mo, Guowei, Cui, Yunxian, Yin, Junwei, Gao, Pengfei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9031343/
https://www.ncbi.nlm.nih.gov/pubmed/35457943
http://dx.doi.org/10.3390/mi13040639

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9031343/
https://www.ncbi.nlm.nih.gov/pubmed/35457943
http://dx.doi.org/10.3390/mi13040639

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