New Fabrication Method of Silicon Sub-Micron Beams with Monolithic Contacts for Thermoelectric Transport Properties Analysis

Micromachined devices were developed and fabricated using complementary metal-oxide-semiconductor (CMOS)/micro-electro-mechanical systems (MEMS) technology allowing for the analysis of transport properties of silicon sub-micron beams having monolithic contacts. The beams were fabricated by a combina...

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Detalles Bibliográficos
Autores principales: Stranz, Andrej, Salleras, Marc, Fonseca, Luis
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9031604/
https://www.ncbi.nlm.nih.gov/pubmed/35458033
http://dx.doi.org/10.3390/nano12081326

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9031604/
https://www.ncbi.nlm.nih.gov/pubmed/35458033
http://dx.doi.org/10.3390/nano12081326

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