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New Fabrication Method of Silicon Sub-Micron Beams with Monolithic Contacts for Thermoelectric Transport Properties Analysis
Micromachined devices were developed and fabricated using complementary metal-oxide-semiconductor (CMOS)/micro-electro-mechanical systems (MEMS) technology allowing for the analysis of transport properties of silicon sub-micron beams having monolithic contacts. The beams were fabricated by a combina...
Autores principales: | Stranz, Andrej, Salleras, Marc, Fonseca, Luis |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9031604/ https://www.ncbi.nlm.nih.gov/pubmed/35458033 http://dx.doi.org/10.3390/nano12081326 |
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