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A Strategy for Extracting Full Material Coefficients of AlN Thin Film Based on Resonance Method
AlN thin film is widely used in piezoelectric MEMS devices, and the accurate characterizations of its material coefficients are critical for the optimization of the AlN thin film process and the design of AlN thin-film-based devices. However, it is difficult to extract the material coefficients of A...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9032807/ https://www.ncbi.nlm.nih.gov/pubmed/35457818 http://dx.doi.org/10.3390/mi13040513 |