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Deposition of MoSe(2) flakes using cyclic selenides
The currently limited portfolio of volatile organoselenium compounds used for atomic layer deposition (ALD) has been extended by designing and preparing a series of four-, five- and six-membered cyclic silylselenides. Their fundamental properties were tailored by alternating the ring size, the numbe...
Autores principales: | Charvot, Jaroslav, Zazpe, Raul, Krumpolec, Richard, Rodriguez-Pereira, Jhonatan, Pavliňák, David, Pokorný, Daniel, Klikar, Milan, Jelínková, Veronika, Macak, Jan M., Bureš, Filip |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
The Royal Society of Chemistry
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9034216/ https://www.ncbi.nlm.nih.gov/pubmed/35480798 http://dx.doi.org/10.1039/d0ra10239c |
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