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Understanding the effect of HF-based wet shallow etching on optical performance of reactive-ion-etched fused silica optics
The optical performance of fused silica optics used in high-power lasers is known to depend not only on their surface damage resistance, but also on their surface quality. Previous studies have shown that good fused silica damage performance and surface quality can be achieved by the use of reactive...
| Autores principales: | , , , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
The Royal Society of Chemistry
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9040614/ https://www.ncbi.nlm.nih.gov/pubmed/35479536 http://dx.doi.org/10.1039/d1ra04174f |