Layered Si–Ti oxide thin films with tailored electrical and optical properties by catalytic tandem MLD-ALD

Oxides with well-controlled optical and electrical properties are key for numerous advances in nanotechnology, including energy, catalysis, sensors, and device applications. In this study we introduce layer-by-layer deposition of silicon–titanium layered oxide (Si–Ti LO) thin films using combined ML...

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Detalles Bibliográficos
Autores principales: Kalderon, Boaz, Sarkar, Debabrata, Killi, Krushnamurty, Danzig, Tamuz, Azulay, Doron, Millo, Oded, Cohen-Taguri, Gili, Yerushalmi, Roie
Formato: Online Artículo Texto
Lenguaje:English
Publicado: The Royal Society of Chemistry 2021
Materias:
Chemistry
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9042836/
https://www.ncbi.nlm.nih.gov/pubmed/35493179
http://dx.doi.org/10.1039/d1ra06764h

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9042836/
https://www.ncbi.nlm.nih.gov/pubmed/35493179
http://dx.doi.org/10.1039/d1ra06764h

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